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. 2018 May 24;18(6):1687. doi: 10.3390/s18061687

Figure 5.

Figure 5

Figure 5

(a) Acoustic wave velocity versus normalized thickness of AlN; (b) Electromechanical coupling coefficient (k2) versus normalized AlN thickness; (c) Acoustic wave velocity versus normalized thickness of SiO2; (d) Electromecanical coupling coefficient versus normalized SiO2.