Table 1.
Structure Dimensions | Value/µm |
---|---|
Wave length | 4 () |
Pitch of electrode | 2 (/2) |
Interdigital Transducer (IDT) width | 1 (/4) |
Si substrate thickness | 40 (10) |
Structure Dimensions | Value/µm |
---|---|
Wave length | 4 () |
Pitch of electrode | 2 (/2) |
Interdigital Transducer (IDT) width | 1 (/4) |
Si substrate thickness | 40 (10) |