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. 2018 May 24;18(6):1687. doi: 10.3390/s18061687

Table 1.

The Summary of dimensions of the device.

Structure Dimensions Value/µm
Wave length 4 (λ)
Pitch of electrode 2 (λ/2)
Interdigital Transducer (IDT) width 1 (λ/4)
Si substrate thickness 40 (10λ)