Table 3.

The material constants used in simulation.

	Symbol	AlN [24]	SiO2 [25]	Si [25]
Density (kg/m3)	ρ	3260	2200	2330
Elastic Constants (GPa)	C11	345	78.5	166
	C12	125	16.1	64
	C13	120	16.1	64
	C33	395	78.5	166
	C44	118	31.2	80
	C66	110	31.2	80
Piezoelectric Constants (C/m2)	e15	−0.48	-	-
	e31	−0.45	-	-
	e33	1.55	-	-
Dielectric Constant (10−11 F/m)	ε11	9	3.32	10.62
	ε33	11	3.32	10.62