Table 4.

Summary of mass loading sensitivity at $t_{AlN}/\lambda$ = 0.5.

${\mathit{t}}_{\mathit{S}\mathit{i}\mathit{O}2}/\mathit{\lambda }$	Rayleigh Sensitivity (KHz/nm)	Sezawa Sensitivity (KHz/nm)
0.5	40.5	23
0.75	26.42	83.6