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. 2018 Jun 2;18(6):1797. doi: 10.3390/s18061797

Table 1.

Bulk AlN properties. The data are taken from references [13,14].

Structural Properties Density (g/cm3) 3.257
Elastic modulus (GPa) 330
Elastic constant C11 (GPa) 410 ± 10
Elastic constant C12 (GPa) 149 ± 1
Elastic constant C13 (GPa) 99 ± 4
Poisson’s ratio 0.22
Crystal structure Wurtzite
Lattice constant (Å) a = 3.112
c = 4.982
Hardness (Kg/mm2) 1100
Water absorption None
Optical Properties Density of states in conduction band (cm−3) 4.1 × 1018
Effective hole mass mhz = 3.53 m0
mhx = 10.42 m0
Density of states in valence band (cm−3) 4.8 × 1020
Optical phonon energy (meV) 113
Refractive index (visible to IR) ~2.15
Electrical Properties Breakdown field (V/cm) 1.2–1.8 × 106
Mobility of electrons/holes (cm2/V·s) 135/14
Dielectric constant (static/high frequency) 8.5–9.14/4.6–4.84
Energy band gap (eV) 6.13–6.23
Resistivity (Ohm·cm) 1015
Thermal Properties Thermal conductivity (W/m·°K) 140–180
Coefficient of thermal expansion (×10−6/°C) 4.2–5.3
Debye temperature (°K) 1150
Melting Point (°C) 2200
Piezoelectric Properties Piezoelectric coefficient e15 (C/m2) −0.33~−0.48
Piezoelectric coefficient e31 (C/m2) −0.38~−0.82
Piezoelectric coefficient e33 (C/m2) 1.26–2.1
Relative permittivity coefficient ɛ11 9
Relative permittivity coefficient ε22 9
Relative permittivity coefficient ε33 11