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Representative examples of high total volatile organic compound (TVOC) concentrations during maintenance tasks in fabrication facility. (a) isopropyl alcohol (IPA) cleaning in etching process; (b) IPA cleaning in thin film process; (c) TVOC concentration measured in trashcan where acetone-soaked cloth (after cleaning) was stored among photolithography track equipment; (d) acetone cleaning in photolithography track breakdown maintenance task.
