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The schematic diagram of the vacuum of the small plasma reactor. 1—discharge chamber, 2—narrow tube with butterfly valve, 3—two-meter long bellows with diameter of 40 mm, 4—trap for fine powder, 5—Roots pump, 6—two-stage oil rotary pump, 7—Pirani vacuum gauge, 8—optical fiber with lens and spectrometer, 9—catalytic probe, 10—gas feeding flow measurement system, 11—air inlet valve, and 12—sample holder.
