Fig. 5.
Fully integrated multiplexed fingerprint sensor. a Optical micrograph multiplexed fingerprint sensor. Scale bar, 1 cm. b Schematic illustration of a multiplexed fingerprint sensor. c, d Real-time measurements of normalized drain current changes for applied pressure at VD = 10 V and VG = 30 V. Different amounts of pressure are applied one by one, sequentially representing step-like features (c). Pressure (100 kPa) is loaded and unloaded repeatedly to evaluate stable and reliable operation (d). e Temperature versus normalized resistance. f Temperatures (30–45 ℃) are loaded and unloaded 30 times to evaluate stable and reliable operation. g Real-time sensing graph of the multifunctional fingerprint sensor array. h Scan image of the real fingerprint. i Two-dimenstional (2D) mapping image of the relative changes in the capacitance of the fingerprint sensor upon the touch of human finger. j Color gradation contour plot of the resultant signals (ΔID/Io) detected from five different pressure sensors by the single touch of a finger