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. Author manuscript; available in PMC: 2018 Jul 4.
Published in final edited form as: Plasma Sources Sci Technol. 2018 Mar 14;27:035007. doi: 10.1088/1361-6595/aab185

Figure 3.

Figure 3

Left panel: Photograph of an a-C:H sample after irradiation of its central part by 5 keV electrons (fluence 4.3 × 1017 electrons cm-2). Middle panel: SEM image of the cross section of an irradiated film. Right panel: CASINO simulation of the penetration of 5 keV electrons in the a-C:H region.