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Reflectivity spectra and optical indices of a-C:H samples. (a) Experimental reflectivity spectrum and model simulation (see text) of (a) a 750 nm thick non-irradiated a-C:H and (b) a 1540 nm thick irradiated a-C:H layer (fluence, 4.3 × 1017 e cm-2). An image of the processed sample can be found in figure 3. (c) Optical indices derived from the optical model for all the studied samples. The Tauc gap energies are Eg=2.7 eV for unprocessed samples and Eg=1.6 eV for processed samples.
