Figure 2.

(a) Measured fin resistance R_fin as a function of fin width W_fin on isolated (triangle) and dense (diamond) fins using high (red) and low (blue) punch-through currents. (b) Relative standard deviation of the measured values of R_fin of Figure 2a as a function of the fin pitch. When using a low punch-through current (blue), the relative standard deviation remains stable (≤3%) regardless of fin pitch, indicating that the electrical contact remains restricted to a single fin, even in the grey area where the electrodes are in physical contact with more than one fin.