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. 2018 Apr 20;7:17181. doi: 10.1038/lsa.2017.181

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Copyright © 2018 The Author(s)

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The depth profile of the pocket machined in Kapton using different lens powers. All of these profiles are machined at a defocus distance . The unit for the color bar is μm and for the scale bar is 100 μm.

Inline graphic — The depth profile of the pocket machined in Kapton using different lens powers. All of these profiles are machined at a defocus distance . The unit for the color bar is μm and for the scale bar is 100 μm.