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. 2018 Jul 27;4(7):eaat5168. doi: 10.1126/sciadv.aat5168

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Copyright © 2018 The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. No claim to original U.S. Government Works. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC).

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Fig. 2 — (A) Schematic of materials synthesis and electrode fabrication processes. (B) SEM characterization of SiO₂ nanoparticles with uniform size distribution. (C) SEM characterization of HCS, with SiO₂ nanoparticle templates being removed by etching. (D) SEM characterization of an electrode with stacked HCS prepared via the typical slurry process. (E and F) STEM image and EDX line scan of ALD Al₂O₃/HCS.