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(A) Photograph of a DVD platform with integrated cantilever chips. The disc is fabricated from glass and SU-8 polymer. Scanning electron microscope images of gold-coated silicon microcantilevers using three data acquisition modes: (B) deflection, (C) surface 3D reconstruction, and (D) resonant frequency. Reprinted with permission from ref (65). Copyright 2011 Royal Society of Chemistry.
