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Maximum acceleration measurement sensitivity as a function of: (a) The period of silicon grating, with sensitivity being higher than 2%/mg with a tolerance of 10 nm; (b) the thickness of silicon grating, with sensitivity that can be higher than 2%/mg with a tolerance of 20 nm; (c) the film thickness, which has little impact on the sensitivity; and (d) the duty cycle, where the sensitivity can be higher than 2.5%/mg with a tolerance of 0.01.
