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Dimensional and performance parameters of the mechanical design.
| Dimensional Parameter | Value |
|---|---|
| Bulky plate | 5.2 mm × 5.2 mm × 0.664 μm |
| l1 | 25 μm |
| l2 | 28 μm |
| l3 | 4 μm |
| l4 | 4 μm |
| w | 0.4 μm |
| t | 0.664 μm |
| Acceleration-displacement sensitivity | 1.56 nm/mg |
| Maximum stress (per g) | 99.8 MPa |
| Resonant frequency | 399.5 Hz |
