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Performance of our scheme design.
| Performance | Value |
|---|---|
| Acceleration sensitivity (ideal) | 2.8%/mg |
| Acceleration sensitivity (with tolerance) | 2%/mg |
| Optical displacement sensitivity | 1.8%/nm |
| Acceleration-displacement sensitivity | 1.56 nm/mg |
| Maximum load (along the sensitive axis) | ~ 1.5 g (10% of fracture limit) 16 g (100% of fracture limit) |
| Resonant frequency | ~ 400 Hz |
