Table 11.

Fluidic simulation results.

ΔP System Input/Output [Pa]	Mass Balance	Mass Flow [kg/s]	Volumetric Flow [m3/s]	ΔP Sensor Input/Output [Pa]
Sample Cavity Length = 2 mm (Vsensor = 2.5336 × 10−7 m3)
100 Pa	Satisfy	4.58 × 10−5	5.325962 × 10−8	17.07
1000 Pa	Satisfy	4.579 × 10−4	5.325 × 10−7	171.01
10000 Pa	Satisfy	4.579 × 10−3	5.3136 × 10−6	1706.35
Sample Cavity Length = 0.5 mm (Vsensor = 6.334 × 10−8 m3)
100 Pa	Satisfy	2.8517 × 10−6	3.316 × 10−5	95.48
1000 Pa	Satisfy	2.8367 × 10−5	3.298 × 10−5	956.96
10000 Pa	Satisfy	2.8359 × 10−4	3.298 × 10−7	9569.14