U11	U22	U33	U12	U13	U23
Cl1	0.0855 (10)	0.0491 (6)	0.0602 (7)	−0.0030 (6)	0.0169 (6)	−0.0015 (5)
Cl2	0.1049 (13)	0.1212 (13)	0.0442 (6)	−0.0094 (11)	0.0269 (7)	−0.0147 (7)
Cl3	0.1298 (15)	0.0642 (8)	0.0694 (8)	−0.0049 (9)	0.0430 (9)	0.0128 (6)
S1	0.0607 (8)	0.0698 (8)	0.0448 (6)	−0.0031 (6)	0.0114 (5)	0.0138 (5)
F1	0.098 (3)	0.096 (3)	0.076 (2)	0.013 (2)	0.030 (2)	−0.0231 (18)
O1	0.141 (4)	0.0503 (19)	0.060 (2)	−0.011 (2)	0.037 (2)	−0.0004 (16)
C1	0.043 (2)	0.054 (2)	0.0392 (18)	0.0025 (19)	0.0072 (16)	0.0064 (16)
C2	0.059 (3)	0.078 (3)	0.0365 (19)	−0.005 (3)	0.0095 (19)	−0.004 (2)
C3	0.056 (3)	0.060 (3)	0.040 (2)	−0.003 (2)	0.0078 (19)	−0.0031 (18)
C4	0.045 (2)	0.051 (2)	0.0357 (18)	−0.0023 (19)	0.0060 (16)	0.0001 (16)
C5	0.066 (3)	0.048 (2)	0.0378 (19)	−0.004 (2)	0.0118 (19)	0.0039 (17)
C6	0.067 (3)	0.051 (2)	0.042 (2)	0.000 (2)	0.017 (2)	0.0039 (18)
C7	0.076 (3)	0.052 (2)	0.039 (2)	0.000 (2)	0.013 (2)	0.0023 (17)
C8	0.041 (2)	0.056 (2)	0.0367 (18)	0.0005 (19)	0.0016 (16)	0.0010 (16)
C9	0.050 (3)	0.061 (3)	0.041 (2)	0.000 (2)	0.0061 (18)	0.0071 (18)
C10	0.050 (3)	0.081 (3)	0.040 (2)	0.002 (3)	0.0093 (19)	0.001 (2)
C11	0.052 (3)	0.081 (4)	0.054 (3)	0.009 (3)	0.010 (2)	−0.015 (2)
C12	0.061 (3)	0.059 (3)	0.071 (3)	0.010 (3)	0.013 (3)	−0.006 (2)
C13	0.057 (3)	0.057 (3)	0.047 (2)	0.006 (2)	0.008 (2)	0.0071 (19)