Figure 3.
Designed feature width versus measured width for different exposure conditions. Only features that reached >90 µm in height (ridges) or depth (trenches) were included. For the pillars, only those that were attached floor to ceiling were included. Standard deviations are indicated for each included point (n = 3). (a) Exterior ridges; (b) Exterior trenches; (c) Interior ridges; (d) Interior trenches; (e) Interior pillars.