Table 1.

Standard deviation of position errors from widefield measurements

Array	x direction (nm)	y direction (nm)
Standard process	1.95 ± 0.03	1.97 ± 0.03
Low current, long dwell	2.43 ± 0.04	2.00 ± 0.03
Low current, many passes	2.11 ± 0.04	1.35 ± 0.02

Uncertainties are one standard error of the standard deviation⁵⁰