Table 2.

Specification of the test sensor.

Structure	BSI MCG (Backside-Illuminated Multi-Collection-Gate) Image Sensor
Shortest frame interval (equivalent frame rate)	10 ns (100 Mfps)
Frame and pixel counts	5 frames for 576 × 512 × 2 pixels * 10 frames for 576 × 512 pixels
Fill factor	100%
Pixel size	12.73 µm × 12.73 µm *
Photoreceptive area	10.368 mm × 9.216 mm *
Process	130 nm CMOS process modified for CCD

* The pixels are staggered. The pitch of the even-column pixels is 18 µm, and the edge length is 12.73 µm (see Figure 1).