Table 2.
Single-objective optimization Opt1k results.
w [µm] | L1 [µm] | L2 [µm] | b [µm] | k [Nm−1] | f [kHz] | Δz [nm] | R [Ω] | |
---|---|---|---|---|---|---|---|---|
Initial | 20.0 | 500 | 50.0 | 100 | 4.32 × 10−2 | 8.00 | 925 | 470 |
Opt1k | 21.1 | 569 | 53.0 | 114 | 3.09 × 10−2 | 6.18 | 1482 | 512 |
Opt1f | 24.6 | 210 | 64.6 | 123 | 0.726 | 45.3 | 67.6 | 138 |
Opt1z | 22.0 | 568 | 63.9 | 128 | 3.25 × 10−2 | 6.21 | 1574 | 478 |
Opt1R | 47.6 | 211 | 80.7 | 119 | 1.39 | 45.2 | 34.3 | 69.3 |