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. 2018 Aug 2;18(8):2533. doi: 10.3390/s18082533

Table 2.

Single-objective optimization Opt1k results.

w [µm] L1 [µm] L2 [µm] b [µm] k [Nm−1] f [kHz] Δz [nm] R [Ω]
Initial 20.0 500 50.0 100 4.32 × 10−2 8.00 925 470
Opt1k 21.1 569 53.0 114 3.09 × 10−2 6.18 1482 512
Opt1f 24.6 210 64.6 123 0.726 45.3 67.6 138
Opt1z 22.0 568 63.9 128 3.25 × 10−2 6.21 1574 478
Opt1R 47.6 211 80.7 119 1.39 45.2 34.3 69.3