Table 3.

Bi-objective optimization results.

	w [µm]	L1 [µm]	L2 [µm]	b [µm]	k [Nm−1]	f [kHz]	Δz [nm]	R [Ω]
Initial	20.0	500	50.0	100	4.32 × 10−2	8.00	925	470
Opt2kR	24.1	557	62.3	110	3.76 × 10−2	6.45	1171	429
Opt2fz	21.0	490	55.4	136	4.82 × 10−2	8.33	1129	438
Opt2fR	60.9	210	86.1	135	1.79	45.4	30.3	56.4
Opt2zR	27.2	569	57.7	111	3.99 × 10−2	6.18	1113	395