Table 4.

Tri-objective optimization Opt3 results.

	w [µm]	L1 [µm]	L2 [µm]	b [µm]	k [Nm−1]	f [kHz]	Δz [nm]	R [Ω]
Initial	20.0	500	50.0	100	4.32 × 10−2	8.00	925	470
Final	24.0	562	68.1	112	3.65 × 10−2	6.33	1226	429