Table 1.
A data summary of test structure dimensions, number of cells inspected (n), percent population of cells with 10° > φ > −10° of the line axis, and axis length ratio (L/S). The culture media initial cell concentration used was ~ 0.5 × 105 cells/mL and cells were incubated on the comb structures for 24 h. Data spreads correspond to one standard deviation.
| Structure | Line/Trench Widths (μm) | Inspected Comb Structure Area (mm2) | Number of Cells Sampled (n) | L/S | % of Population Aligned ± 10° from Trenches (10° > φ > −10°) |
|---|---|---|---|---|---|
| 1 | 0.15/0.21 | 1.8 | 361 | 2.09 ± 0.53 | 60.4 ± 2.6 |
| 2 | 0.24/0.26 | 1.8 | 260 | 1.92 ± 0.55 | 46.5 ± 3.6 |
| 3 | 0.5/0.5 | 1.8 | 292 | 1.86 ± 0.52 | 42.1 ± 2.9 |
| 4 | 1/1 | 1.8 | 262 | 2.38 ± 0.72 | 63.4 ± 0.9 |
| 5 | 2/2 | 1.8 | 257 | 2.67 ± 0.98 | 71.2 ± 8.5 |
| 6 | 5/5 | 1.8 | 297 | 2.45 ± 0.67 | 88.2 ± 1.2 |
| 7 | 10/10 | 1.8 | 386 | 2.98 ± 0.82 | 91.2 ± 2.7 |
| 8 | 50/50 | 1.8 | 305 | 1.94 ± 0.79 | 37.4 ± 1.0 |
| 9 | 100/100 | 6.6 | 1348 | 1.49 ± 0.32 | 26.6 ± 2.5 |
| 10 | blanket Ta film | 1.8 | 457 | 1.64 ± 0.44 | 8.1 ± 3.6 |