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Effect of the deposition temperature on the morphology of the ALD-grown TiO2. Representative TEM images of the TiO2/graphene composites obtained after 10 cycles at 100, 200, and 300 °C. All the experiments were carried out by following the pulsing sequence: 30 s TiCl4—5 min N2 purge—30 s H2O—5 min N2 purge.
