Table 6. Magnitudes of metrology changes.
Level | Shift (µm) | z Offsets (µm) | τ1 (°) | |
---|---|---|---|---|
Cycle 1 | Detector | 56.3 ± 0.0 | 99.3 | 0.0 ± 0.0 |
Quadrants | 138.3 ± 110.7 | −118.1 | 0.2 ± 0.2 | |
Sensors | 53.7 ± 53.5 | 37.2 | 0.2 ± 0.1 | |
Cycle 2 | Detector | 0.4 ± 0.0 | −42.8 | 0.0 ± 0.0 |
Quadrants | 3.8 ± 1.5 | −18.0 | 0.0 ± 0.0 | |
Sensors | 9.8 ± 6.3 | 71.0 | 0.0 ± 0.0 | |
Cycle 3 | Detector | 0.1 ± 0.0 | −84.0 | 0.0 ± 0.0 |
Quadrants | 1.6 ± 0.5 | 3.6 | 0.0 ± 0.0 | |
Sensors | 11.1 ± 6.1 | 86.0 | 0.0 ± 0.0 | |
Cycle 4 | Detector | 0.2 ± 0.0 | −92.2 | 0.0 ± 0.0 |
Quadrants | 1.5 ± 0.7 | 3.3 | 0.0 ± 0.0 | |
Sensors | 9.0 ± 6.3 | 90.9 | 0.0 ± 0.0 |