Table 8. R.m.s.d. of reflections on the back detector.
Step | No. of reflections | R.m.s.d., overall (µm) | R.m.s.d., common set (µm) |
---|---|---|---|
Initial | 11381 | 926.4 | 740.5 |
Level 0 (detector) | 10820 | 797.9 | 683.0 |
Level 1 (quadrants) | 10546 | 630.1 | 496.4 |
Level 2 (sensors) | 9896 | 361.3 | 361.3 |