Figure 6.

a) Measured (green spheres) versus theoretical diffraction efficiencies (purple spheres and orange circles) for the tilted ML‐FZPs. The theoretical calculations were done according to CWT. The difference of the thickness of each period was taken into account (nonlocal, integrated). b) STXM image of the Siemens Star test sample. Energy is 1175 eV. Step size is 20 nm. Scale bar is 5 µm. c) STXM image of a quarter of the inner rings of the Siemens Star test sample. Energy is 1175 eV. Step size is 10 nm. Scale bar is 500 nm.