Figure 1.

Schematic overview of template-guided self-assembly of optoplasmonic arrays. a) A regular pattern of wells with diameters D1 and D2 (D1 > D2) is created through EBL in a PMMA layer to generate b) a regular mask of assembly sites with two different diameters. The center-to-center separation in the D1 and D2 sub-arrays is Λ. c) Dragging of a suspension of TiO₂ NPs with diameters too large to bind to D 2 across the surface results d) in an immobilization of TiO₂ NPs onto D1 sites. e) Smaller AuNPs are assembled onto vacant D2 binding sites from a colloidal solution. f) After PMMA lift-off, the final optoplasmonic array is released.