Figure 3.
Mixed-gas permeation setup (1: MFC-safety trap; 2: Humidifier; 3: Droplets trap; 4: Membrane module; 5: Heated cabinet; 6: Water knockout; 7: Bubble flow meters; MFC: Mass flow controller; NV: Needle valve; BPR: Back-pressure regulator; PI: Pressure indicator; HT: Humidity and temperature sensor; MWV: Multi-way valve; GC: Gas chromatograph).