Table 2.
The parameters of 2.5D Parylene C micropore-arrayed membrane for filtration investigation and optimization
| Case no. | Design value in mask (μm) | Measured value after preparation (μm) | Porosity (%) | ||||
|---|---|---|---|---|---|---|---|
| d | d’ | s | d | d’ | s | ||
| 1 | 8 | 6.93 | 4 | 7.51 ± 0.13 | 6.50 ± 0.11 | 4.46 ± 0.09 | 40.19 |
| 2 | 10 | 8.66 | 4 | 9.13 ± 0.09 | 7.90 ± 0.08 | 4.69 ± 0.24 | 46.79 |
| 3 | 12 | 10.40 | 4 | 11.21 ± 0.11 | 9.71 ± 0.10 | 4.77 ± 0.15 | 52.14 |
| 4 | 15 | 12.99 | 4 | 14.52 ± 0.20 | 12.57 ± 0.17 | 4.43 ± 0.06 | 58.46 |
| 5 | 12 | 10.40 | 2 | 11.42 ± 0.17 | 9.89 ± 0.15 | 2.46 ± 0.11 | 70.33 |
| 6 | 100 | 86.60 | 4 | 99.35 ± 0.50 | 86.04 ± 0.43 | 4.48 ± 0.11 | 91.37 |