Table 1.

Sensitivity results (unit: mm⁻¹) from Figure 4.

	Depth (μm)	100	200	300
Pitch (mm)
2.5		0.0078	0.0163	0.0606
2.0		0.0098	0.0210	0.0363
1.5		0.0398	0.0393	0.0359
1.0		0.0457	0.0195	0.0155