Table 1.
Deposition Parameters | Fluidized Bed Generator | Brush Generator |
---|---|---|
Piston diameter/mm | - | 20 |
Brush rotation/rpm | - | 1200 |
Carrier gas | N2 5.0 purity | |
Flow rate/nL/min | 6 | 20 |
Scan speed/mm/s | 1.5 | 1 |
Piston speed/Feed rate/mm/h | - | 120–500 |
Nozzle orifice/mm² | 5 |