Fig. 2.

Active tuning of Fano resonances in MEMS metasurface. a Depicts the experimentally measured THz transmission spectra showing the evolution of Fano resonance for continuous actuation of SRR-1 by varying voltage V₁, while keeping V₂ = 0 V. b Represents the measured spectra resulting from the actuation of SRR-2 by increasing V₂, while keeping V₁ = 35 V. Inset figure depicts the experimentally mapped actuation angles (with the error bars) of the SRR cantilevers of metal thickness 900 nm under the applied voltage (V) for the designed MEMS Fano-metasurface. c, d Numerically simulated THz transmission spectra for increasing and decreasing structural asymmetry configurations of the proposed MEMS Fano-metasurface. The values of the depicted asymmetry parameter (δ) in (c) and (d) show one-to-one correspondence with the voltage values of V₁ and V₂ varied in (a) and (b), respectively. The insets in (c) and (d) signify the sequential actuation of SRR-1 and SRR-2, respectively, showing the increasing and decreasing structural asymmetry configurations