Figure 13.

2 × 2 array of nanotrees consisting of a root and branches deposited with the CoFe precursor and a connecting node in the middle of each tree deposited with the Pt precursor. In the bottom right corner two pillars, serving as markers, are visible. On each pillar base a thinly-defined star pattern is visible, which was deposited and used for aligning the second (Pt(C)) and third (CoFe) structure elements. The pillars are part of the first pattern file. Every star is part of either the second or the third pattern file. They can be defined by a single line in the geof. Beam current: 13 pA.