Table 1.

Execution time of the pattern generator for selected examples of generated pattern files. All pattern files were generated using parameter settings for the Pt precursor. #DE specifies the total number of deposition events of the pattern file, #f the total number of frames and PAA the angle sorted (as) or best permutation (bp) proximity avoiding algorithm. Note that the single coils from Figure 9A and B are two times larger in x-, 2.5 times larger in y- and roughly two times larger in z-direction than each coil of the 3-layered coils from Figure 9C and D. Although Figure 9B has less DEs and frames than Figure 9D, the computation time for B was longer due to an approximately 18% higher number of DEs per frame in B than D (the higher coils in D have less turns). More DEs per frame make the bpPAA slower, since the number of possible permutations is larger. For the generation of the buckyball a smaller n_survivors was used than for the coils which results in a shorter execution time.

Object	Figure	Gen. time [s]	#DE	#f	PAA	Dep. time [s]
coil	Figure 9A	1.2	153 223	13 255	as	153
coil	Figure 9B	258.1	153 223	13 255	bp	153
3 coils	Figure 9C	1.5	207 623	21 231	as	208
3 coils	Figure 9D	244.2	207 623	21 231	bp	208
tower	Figure 10A	3.7	418 257	46 996	as	418
tower	Figure 10B	3.8	445 185	49 634	as	537
buckyball	Figure 12	108.1	120 383	16 886	bp	119