Table 1.
Main characteristics of piezoresistive, piezoelectric and piezotransistive transductions.
| MEMS. | Transduction | Actuation | Micromachining | Operating Mode | Sensitivity Max | Applications |
|---|---|---|---|---|---|---|
| Piezoresistive cantilever [5,17,18,19,20,21,22,23,24,25,26,27,28,29] | Piezoresistive | - | Photo-patternable Bulk stacking | Static and Dynamic | 200 [28] | Strain, temperature, gas sensing |
| Piezoelectric resonator [31,32,33,34,35,36,37] | Piezoelectric | Piezoelectric | Bulk stacking | Dynamic | NA | Liquid sensing, energy harvesting |
| OFET-embedded cantilever [45,46] | Piezotransistive | - | Bulk stacking | Static | 600 [46] | Strain, gas sensing |