| DOF | degree(s) of freedom |
| DOC | degree(s) of constraint |
| FEA | finite element analysis |
| CPM | compliant parallel mechanism |
| MS | motion stage |
| BS | base stage |
| AM | actuated compliant module |
| PM | passive compliant module |
| RL | rigid link |
| TBCM | two-beam compliant module |
| DTBCM | double-two-beam compliant module |