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Mean values of uncertainty contributions and expanded uncertainty for the five measurands.
| Uncertainty Contribution | ODt/µm | IDb/µm | ODb/µm | Lmark/µm | Aflash/µm2 |
|---|---|---|---|---|---|
| ucal | 0.50 | 0.50 | 0.50 | 0.45 | / |
| ures | 0.13 | 0.13 | 0.13 | 0.04 | 0.19 |
| uw | 0.19 | 0.20 | 0.16 | 0.73 | 1.5 × 102 |
| up | 0.12 | 0.12 | 0.12 | 0.37 | / |
| U (k = 2) | 1.1 | 1.1 | 1.1 | 1.9 | 3.0 × 102 |
