Table 1.

Parameters of aluminum nitride (AlN)-Si composite cantilever for calculation and simulation.

Names	Parameters	Values	Units
EAlN	Young’s modulus	410	GPa
ESi	Young’s modulus	160	GPa
EMo	Young’s modulus	312	GPa
EAl	Young’s modulus	70	GPa
dAlN	Thickness	1.5	μm
dSi	Thickness	20	μm
dMo	Thickness	0.3	μm
dAl	Thickness	0.3	μm
d31	Piezoelectric coefficient	−2.6	pm/V
L	Length of cantilever	600	μm
W	Width of cantilever	22.87	μm
Wdri	Width of drive electrode	3	μm
U0	Amplitude	1	V