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Sizes of AlN-Si composite cantilever gyroscope.
| Names | Parameters | Values | Units |
|---|---|---|---|
| L | Length of cantilever | 600 | μm |
| W | Width of cantilever | 22.87 | μm |
| Wdri | Width of drive electrode | 3 | μm |
| Wdri_det | Width of drive-detected electrode | 3 | μm |
| Wsen | Width of sense electrode | 4 | μm |
| dAlN | Thickness | 1.5 | μm |
| dSi | Thickness | 20 | μm |
| dMo | Thickness | 0.3 | μm |
| dAl | Thickness | 0.3 | μm |
