Table 1.
Geometric Parameter | Value (In µm) |
---|---|
Length of initial part of main channel, L0 | 100 |
Exit channel length, Le | 1500 |
Total length, Lt | 2150 |
Pitch length, Pi | 275 |
Width of main channel, W | 200 |
Width of O-structure, w1 | 50 |
Width of X-structure, w2 | 50 |
Distance between O-structures, d | 75 |
Depth of horizontal portion of O-structure, h1 | 50 |
Depth of X-structure, h2 | 50 |
Total depth of main channel, H | 100 |