Figure 14.

Simulated steady-state lateral displacement profile of the polysilicon electrothermal microgripper: at no applied potential (a), and when each arm is subjected to an applied potential of 3 V (b). The gap opening in the closed position is 5 $\mathsf{\mu }$m (a). At 3 V, each arm moves laterally by 2.6 $\mathsf{\mu }$m such that the total gap opening at 3 V is 10.2 $\mathsf{\mu }$m (b).