Table 1.

Geometrical parameters of the fabricated microgripper.

Parameter	Value	Unit
Length of hot arm, $L_h$	200	$\mathsf{\mu }$m
Length of cold arm, $L_c$	154	$\mathsf{\mu }$m
Length of flexure, $L_f$	46	$\mathsf{\mu }$m
Length of connector, $L_g$	3	$\mathsf{\mu }$m
Length of gripping arm, $L_a$	203	$\mathsf{\mu }$m
Width of hot arm, $w_h$	9	$\mathsf{\mu }$m
Width of cold arm, $w_c$	55	$\mathsf{\mu }$m
Width of flexure, $w_f$	9	$\mathsf{\mu }$m
Width of gripping arm, $w_a$	9	$\mathsf{\mu }$m
Thickness of silicon substrate	20	$\mathsf{\mu }$m
Thickness of silicon nitride	0.6	$\mathsf{\mu }$m
Thickness of air gap	2.75	$\mathsf{\mu }$m
Thickness of dimples	2	$\mathsf{\mu }$m
Thickness of Poly2	1.5	$\mathsf{\mu }$m
Thickness of Metal	0.5	$\mathsf{\mu }$m