Table 3.

The output voltages of the array-type sensor without compensation during the pressure increasing and pressure decreasing cycle at 20 °C.

P/kPa	10	20	30	40	50	60	70	80	90	100
Uinc/mV	1.123	2.229	3.401	4.538	5.669	6.795	7.933	9.064	10.222	11.342
Udec/mV	1.140	2.246	3.422	4.556	5.692	6.811	7.954	9.080	10.231	11.346
Uinc/mV	1.132	2.222	3.386	4.541	5.675	6.792	7.933	9.065	10.228	11.357
Udec/mV	1.141	2.240	3.405	4.558	5.694	6.812	7.949	9.082	10.239	11.357
Uinc/mV	1.122	2.230	3.404	4.540	5.684	6.794	7.933	9.064	10.240	11.356
Udec/mV	1.138	2.247	3.421	4.563	5.705	6.812	7.951	9.082	10.241	11.357
Uinc/mV	1.125	2.230	3.402	4.539	5.680	6.794	7.934	9.064	10.233	11.351
Udec/mV	1.140	2.246	3.422	4.561	5.701	6.811	7.952	9.081	10.236	11.353