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. 2018 May 1;9(5):212. doi: 10.3390/mi9050212

Figure 2.

Figure 2

Fabrication process of microfluidic solid-phase micro-extraction (SPME) module ESI emitter: (a) Photo mask A, photo mask B and SU-8 master mold of integrated-corner ESI emitter; (b) Photo mask A, photo mask B, photo mask C and SU-8 master mold of FF ESI emitter; (c) illustration of single polydimethylsiloxane (PDMS) slabs of both chips.