Table 2.
Data summary of number of cells inspected (n), percent population of cells with 10° > ϕ > −10° of the line axis, and axis length ratio (L/S). The culture media initial cell concentration used was ~0.5 × 105 cells/mL. Data spreads correspond to one standard deviation.
| Structure | Line (L)/Trench (T) Width (μm) | Inspected Comb Structure Area (mm2) | Number of Cells Sampled (n) | Coverage (cell/mm2) | L/S | % of Population Aligned ±10° from Lines |
|---|---|---|---|---|---|---|
| 1 | 0.18 | 1.8 | 281 | 156 | 2.2 + 0.7 | 63.0 + 1.4 |
| 2 | 0.25 | 1.8 | 171 | 95 | 2.3 + 0.8 | 55.6 + 4.1 |
| 3 | 0.5 | 1.8 | 235 | 131 | 2.1 + 0.6 | 53.2 + 7.4 |
| 4 | 1 | 1.8 | 197 | 109 | 2.7 + 0.9 | 77.7 + 2.0 |
| 5 | 2 | 1.8 | 179 | 99 | 2.8 + 1.4 | 68.7 + 4.9 |
| 6 | 5 | 1.8 | 238 | 132 | 2.4 + 1.2 | 68.0 + 6.2 |
| 7 | 10 | 1.8 | 159 | 88 | 2.3 + 0.8 | 71.7 + 8.6 |
| 8 | 50 | 1.8 | 337 | 187 | 1.6 + 0.3 | 18.7 + 7.7 |
| 9 | 100 | 6.6 | 947 | 143 | 1.5 + 0.4 | 17.4 + 0.3 |
| 10 | blanket Ta | 1.8 | 303 | 168 | 1.5 + 0.4 | 8.6 + 5.5 |