Table 1.

Properties of the microactuator.

Part	Material	Value
Central Platform	Permalloy	1 mm × 1 mm × 15 µm
Planar Microcoil	Copper	2.5 mm
Microspring	Nickel	3 mm × 3 mm × 12 µm
Yoke	Permalloy	2.8 mm × 2.8 mm × 50 µm
Substrate	Ferrite	2.8 mm × 2.8 mm × 200 µm
Supporter	Nickel	1.2 mm × 0.2 mm × 160 µm